国際会議

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8th International Workshop on Piezoelectric MEMS (virtual conference)

-June 2021, virtual conference-

■Investigation of electromechanical characteristics of 2-degree-of-freedom MEMS piezoelectric vibration energy harvester under impulsive force   S. Aphayvong
■Investigation of the growth mechanism of BiFeO3 films on sputtering method  R. Kikuchi
■Electrical properties of organic piezoelectric P(VDF-TrFE) films fabricated by various solvent  K. Hiratsuka
■Characteristics of Al1-xScxN epitaxial thin film on Si substrate by changing nitrogen partial pressure  K. Miyaji