国際会議

category

IEEE IFCS-ISAF 2020 (virtual conference)

-July 2020, Colorado, USA-

■Observation of Domain Structure of P(VDF-TrFE) Films Using Direct Piezoelectric Response Microscopy   T. Yoshimura
■Formation Process of Metastable Phases of Al-Doped HfO2 Films Directly on Si by Atomic Layer Deposition    S. Takarae
■Investigation of the Growth Mechanism of PZT Films Using Combinatorial Sputtering Method   M. Murase
■Electromechanical Properties of MEMS Piezoelectric Vibration Energy Harvester for Impulse Vibration   S. Aphayvong