Conference Program
Day |
Session |
Time |
|
6/7
|
|
9:5O |
Opening Takeshi Yoshimura (Osaka Prefecture University) |
Session I
Chair:
|
10:00 |
Development of Piezoelectric Epitaxial Thin Film for High-Performance MEMS |
|
Invited |
*Shinya Yoshida1 |
||
|
1.Tohoku Univ. |
||
10:30 |
Sputter-Epitaxy of Sm-Doped Pb(Mg1/3, Nb2/3)O3–PbTiO3 on Si towards Giant-Piezoelectric MEMS Actuator |
||
|
*Xuanmeng Qi1, Shinya Yoshida1, Shuji Tanaka1 |
||
|
1.Tohoku Univ. |
||
10:45 |
Fabrication of Pb(Zr,Ti)O3 Thin Films on Glass Substrates for Transparent Piezoelectric Devices |
||
|
*SangHyo Kweon1, Kazuki Ueda1, Yuichi Kanayama1, Isaku Kanno1 |
||
|
1.Kobe Univ., 2.Osaka Pref. Univ. |
||
11:00 |
Enhanced Piezoelectric Response in (111)-Pb(Zr,Ti)O3 Artificial Superlattice Thin Films |
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|
*Tomoaki Yamada1, Jundong Song1, Youhei Ebihara1, Takanori Kiguchi2, Masahito Yoshino1, Takanori Nagasaki1 |
||
|
1.Nagoya Univ., 2.Tohoku Univ. |
||
11:15 |
Characteristics of Nb-doped PZT Thin Film for MEMS Actuator Device |
||
|
*Hiroyuki Kobayashi1, Seigo Nakamura1, Yoshikazu Hishinuma1, Takayuki Naono1, Shinya Sugimoto1, Koichiro Nakamura1 |
||
|
1.FUJIFILM Corporation |
||
11:30 |
Highly Reliable PZT Thin Films on 8-inch Wafers by Sputtering |
||
|
*Kohei Matsuoka1, Tatsurou Tsuyuki1, Hiroki Kobayashi1, Isao Kimura1, Takehito Jimbo1, Koukou Suu1 |
||
|
1.ULVAC, Inc. |
||
Lunch Break |
11:45- 13:15 |
|
|
Session II
Chair: |
13:15 |
Measurement of GHz kt2 Hysteresis Curve in Piezoelectric Film/Substrate Structure Without Removing Substrate |
|
Invited |
*Takahiko Yanagitani1, 2, 3 |
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|
1.Waseda Univ., 2.JST CREST, 3.ZAIKEN |
||
13:45 |
Investigation of Optimal Sputter-Deposition Condition for Y-doped HfO2 Ferroelectric Film with Sub-micrometer Thickness on Si Substrate |
||
|
*Lucie Ouedraogo1, Shinya Yoshida1, Ryo Ebihara1, Shuji Tanaka1 |
||
|
1.Tohoku Univ. |
||
14:00 |
Growth of Crystalline Sodium Potassium Niobate Thin Films at Low Temperature and Their Application to Piezoelectric |
||
Invited |
Jong-Un Woo1, Jong-Hyun Kim1, In-Su Kim2, Ho-Sung Shin2, Hyun-Gyu Hwang1, Sang Hyo Kweon3, *Sahn Nahm1, 2 |
||
|
1.Korea Univ., 2.Korea Univ., 3.Kobe Univ. |
||
14:30 |
Piezoelectric Properties of Lead-free Epitaxial (K,Na)NbO3 Films Grown on Si Substrates by Sputtering |
||
|
*Kiyotaka Tanaka1, Yoshimasa Sai1, Yoshiyuki Kawata1, Sang Hyo Kweon1, Goon Tan2, Isaku Kanno1 |
||
|
1.Kobe Univ., 2.Osaka Pref. Univ. |
||
Break |
14:45- 15:00 |
|
|
Session III
Chair: |
15:00 |
AlN Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Applications |
|
Invited |
*Jin Xie1 |
||
|
1.Zhejiang Univ. |
||
15:30 |
Acoustic Field Evaluation of a 1.5D PMUT Array for Medical Imaging |
||
|
*Kenji Suzuki1, Yuta Nakayama1, 2, Naoki Shimizu1, Takeshi Yoshimura3, Yoshio Mita2, Takashi Mizuno1 |
||
|
1.Konica Minolta, Inc., 2.The University of Tokyo, 3.Osaka Pref. Univ. |
||
15:45 |
Solidly Mounted Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Films |
||
|
Fazel Parsapour1, Vladimir Pashchenko2, Heinz Bernd3, Nicolay Pascal4, Ingo Bleyl5, Ulrike Roesler5, *Paul Muralt1 |
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|
1.EPFL, 2.Silicon Austria Labs GmbH, 3.EVATEC AG, 4.CUAS, 5.RF360 Europe GmbH |
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Session IV
Chair: |
16:00 |
Overcoming the PVD Challenges in Volume Production of highly-doped AlScN PiezoMEMS |
|
|
*Chris Jones1 |
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|
1.SPTS Technologies Ltd |
||
16:15 |
Solmates Pulsed Laser Deposition, a production platform for high quality thin film piezo materials |
||
|
*Thomas Arend Aukes1, Bart Berenbak1, Wico Hopman1, Kristiaan Bohm1, Matthijn Dekkers1, Arjen Janssens1 |
||
|
1.Solmates BV |
||
16:30 |
The Journey to World Class Foundry Manufacturing of PZT MEMS |
||
Invited |
*Niklas Svedin1, Peter Ågren1, Andrius Miniotas1, Christian Strondl1, Christopher Ernerheim Jokumsen1 |
||
|
1.Silex Microsystems |
||
6/8
|
Session V
Chair: |
09:00 |
Influence of Graded Doping on the Long – term Reliability of Nb-doped Lead Zirconate Titanate Films |
|
Wanln Zhu1, Betul Akkopru Akgun1, Jung In Yang1, Ke Wang1, Carlos Fragkiadakis2, Song Won Ko2, Peter Mardilovich2, |
||
|
1.The Pennsylvania State University, 2.Xaar PLC |
||
09:15 |
Highly Tensile and Compressive Stress Dependency of the Effective Longitudinal (d33) and Transverse (e31) Piezoelectric Coefficients of AlN Thin Films for MEMS Devices |
||
|
*RAJESH PANDIYAN1, Cheikhou Ba1, Roland Kessels3, Gabriel Droulers2, Azin Aghdaie1, Mohamed El Gowini2, Luc G Fréchette1 |
||
|
1.Universite de Sherbrooke, 2.Teledyne DALSA Semiconducteur, 3. aixACCT Systems GmbH |
||
09:30 |
Production of Piezoelectric Thin Film by Unique Single Crystallization Technology |
||
Invited |
*Hiroaki Kanamori1, Akio Konishi1, Juichiro Yamaguchi1 |
||
|
1.KRYSTAL Inc. |
||
Break |
10:00- 10:15 |
|
|
Session VI
Chair:
|
10:15 |
High Reliable PZT-MEMS Scanning Mirror for Automotive Lighting System |
|
Invited |
*Hiroyuki Ogihara1, Takaaki Koyama1, Masanao Tani1, Yoshiaki Yasuda1 |
||
|
1.Stanley Electric Co., Ltd. |
||
10:45 |
Resonant Drive of All-around Scanning MEMS Mirror with Piezoelectric Actuators |
||
|
*Yoshitaka Kajiyama1, Yoshiaki Hirata1, Yasuhito Shimakura1, Kensuke Kanda2, Takayuki Fujita2, Kazusuke Maenaka2 |
||
|
1.Mitsubishi Electric Corporation, 2.University of Hyogo |
||
11:00 |
Development of ultra-thin PZT/Silicon Vibrator for Haptics Application |
||
|
*Toshihiro Takeshita1, Takahiro Yamashita1, Toshiyuki Tsubakimoto2, Hidetoshi Nishio2, Hiroyuki Okuno2, Takuto Ohzawa2, Takeshi Kobayashi1 |
||
|
1.National Institute of Advanced Industrial Science and Technology, 2.OMRON Corporation |
||
11:15 |
Investigation of Electromechanical Characteristics of 2-degree-of-freedom MEMS Piezoelectric Vibration Energy Harvester under Impulsive Force |
||
|
*Sengsavang Aphayvong1, Takeshi Yoshimura1, Kensuke Kanda2, Shuichi Murakami3, |
||
|
1.Osaka Pref. Univ., 2.Univ. of Hyogo, 3.ORIST |
||
11:30 |
Nonlinear Response in Piezoelectric MEMS Vibration Energy Harvesters using Lead-Free BiFeO3 Film |
||
|
*Shuichi Murakami1, Takeshi Yoshimura2, Sengsavang Aphayvong2, Masaaki Aramaki2, Yusuke Kanaoka1, Kazuo Satoh1, Norifumi Fujimura2 |
||
|
1.Osaka Research Institute of Industrial |
||
6/9 |
on-demand
Chair: |
Invited |
Chemical Solution Deposition of Lead-Based and Lead-Free Ferroelectric-Oxide Thin Films: Comparisons, Differences |
|
*Barbara Malic1, 2, Brigita Kmet1, 2, Hana Ursic1, 2, Andreja Bencan1, 2 |
||
|
1.Jozef Stefan Institute, 2.Jozef Stefan International Postgraduate School |
||
|
Piezoelectric Properties of Pb(Zr,Ti)O3 Artificial Superlattice Thin Films |
||
|
*Goki Kimura1, Sang-Hyo Kweon1, Goon Tan2, Isaku Kanno1 |
||
|
1.Kobe University, 2.Osaka Prefecture University |
||
|
Investigation of the Growth Mechanism of Sputtered BiFeO3 Thin Films |
||
|
*Risa Kikuchi1, Mikio Murase1, Takeshi Yoshimura1, Norifumi Fujimura1 |
||
|
1.Osaka Pref. Univ. |
||
|
Advances in Production Scale Al1-xScxN with Low Film Stress and Low Number of Abnormally Oriented Grains |
||
|
*Volker Roebisch1, Xiang Yao1, Andrea Mazzalai1 |
||
|
1.EVATEC AG – BU Semiconductor |
||
|
Epitaxial Growth of Al1-xScxN Thin Films on Si Substrate by RF Magnetron Sputtering using TiN Buffer Layer |
||
|
*Kohei Miyaji1, Mikio Murase1, Takeshi Yoshimura1, Norifumi Fujimura1 |
||
|
1.Osaka Pref. Univ. |
||
on-demand
Chair: |
Invited |
Defect Chemistry, Charge Transport Mechanisms, and Lifetime in Hheavily Nb Doped PZT Films |
|
|
*Betul Akkopru-Akgun1, Susan Trolier-McKinstry1 |
||
|
1.Penn State Univ. |
||
Invited |
PiezoMEMS-Development at Bosch – Accelerating the path to reliable materials for future product innovations |
||
|
*Daniel Monteiro Diniz Reis1 |
||
|
1.EPT1.2, Robert Bosch GmbH |
||
|
Ferroelectric Switching Mechanism and Dynamics in Wurtzite Al0.7Sc0.3N Thin Films |
||
|
*Keisuke Yazawa1, 2, Daniel Drury 1, 2, Andriy Zakutayev2, Geoff L Brennecka1 |
||
|
1.Colorado School of Mines, 2.Natinal Renewable Energy Laboratory |
||
|
Relaxor-Ferroelectric 0.9Pb(Mg1/3Nb2/3)O3–0.1PbTiO3 |
||
|
*Hana Ursic1, 2, Matej Sadl1, 2, Oana Andreea Condurache1, 2, Andreja Bencan1, 2, Mirela Dragomir1, Barbara Malic1, 2 |
||
|
1.Jozef Stefan Institute, 2.Jožef Stefan International Postgraduate School |
||
|
Piezoelectric Properties of Organic Ferroelectric P (VDF-TrFE) Fabricated by Various Solvents |
||
|
*Kazuki Hiratsuka1, Izuru Kanagawa1, Takeshi Yoshimura1, Norifumi Fujimura1 |
||
|
1.Osaka Pref. Univ. |
||
on-demand
Chair:
|
Invited |
Piezoelectric pMUT Transducers for High Frequency Ultrasound Applications |
|
|
*Qifa Zhou1 |
||
|
1.Univ. of Southern California |
||
|
Buckling Control and Design of Multilayered MEMS Diaphragms for Highly Sensitive Piezoelectric Ultrasonic |
||
|
*Kaoru Yamashita1, Takuma Yoshida1, Akifumi Nishikawa1, Genichiro Kiyota1, Shota Nakajima1 |
||
|
1.Kyoto Institute of Technology |
||
|
All-Printed Piezoelectric Haptic Device |
||
|
*Longfei Song1, 2, Sebastjan Glinsek1, Veronika Kovacova1, Emmanuel Defay1 |
||
|
1.Luxembourg Institute of Science and Technology, 2.Univ. of Luxembourg |
||
|
PiezoMEMS Based 3D Imaging Systems for Space Exploration |
||
|
*Runar Plunnecke Dahl-Hansen1, Jo Gjessing1, Jens Thielemann1, Petter Risholm1, Charalampos Fragkiadakis2, Peter Mardilovich2, Jostein Thorstensen1 |
||
|
1.SINTEF Digital, 2.AixACCT Systems GmbH |
||
|
Piezoelectric MEMS Energy Harvesting from Tire Tread Acceleration |
||
|
*Takahito Yokota1, Kazusuke Maenaka1, Kensuke Kanda1, Takayuki Fujita1 |
||
|
1.Univ. of Hyogo |
||
|
Piezoelectric MEMS Mirror for Endoscope and Its Driving Integrated Circuit |
||
|
*Rintaro Shimada1, Yusuke Kitada1, Kensuke Kanda1, Takayuki Fujita1, Kazusuke Maenaka1 |
||
|
1.Univ. of Hyogo |