Research facilities
Film deposition apparatus
Major film deposition equipment is available.
Structure analysis apparatus
Analyze the crystal structure of producted sample.
4 rotates x‐ray analysis apparatus |
Electrical characteristic evaluation apparatus
We are evaluating the physical properties of semiconductors and dielectrics.
Others
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Ultra-pure water making apparatus |
Cold isostatic pressing apparatus |
Common equipment
Field emission form scanning electron microscope
Transmission electron microscopy
Photolithography device