Day

Session

Time

6/7

9:5O

Opening

Takeshi Yoshimura (Osaka Prefecture University)

Session I
(Thin Film Growth)

Chair:
Kensuke Kanda
(Univ. of Hyogo)

10:00

Development of Piezoelectric Epitaxial Thin Film for High-Performance MEMS

Invited

*Shinya Yoshida¹

1.Tohoku Univ.

10:30

Sputter-Epitaxy of Sm-Doped Pb(Mg_1/3, Nb_2/3)O₃–PbTiO₃ on Si towards Giant-Piezoelectric MEMS Actuator

*Xuanmeng Qi¹, Shinya Yoshida¹, Shuji Tanaka¹

1.Tohoku Univ.

10:45

Fabrication of Pb(Zr,Ti)O₃ Thin Films on Glass Substrates for Transparent Piezoelectric Devices

*SangHyo Kweon¹, Kazuki Ueda¹, Yuichi Kanayama¹, Isaku Kanno¹

1.Kobe Univ., 2.Osaka Pref. Univ.

11:00

Enhanced Piezoelectric Response in (111)-Pb(Zr,Ti)O₃ Artificial Superlattice Thin Films

*Tomoaki Yamada¹, Jundong Song¹, Youhei Ebihara¹, Takanori Kiguchi², Masahito Yoshino¹, Takanori Nagasaki¹

1.Nagoya Univ., 2.Tohoku Univ.

11:15

Characteristics of Nb-doped PZT Thin Film for MEMS Actuator Device

*Hiroyuki Kobayashi¹, Seigo Nakamura¹, Yoshikazu Hishinuma¹, Takayuki Naono¹, Shinya Sugimoto¹, Koichiro Nakamura¹

1.FUJIFILM Corporation

11:30

Highly Reliable PZT Thin Films on 8-inch Wafers by Sputtering

*Kohei Matsuoka¹, Tatsurou  Tsuyuki¹, Hiroki Kobayashi¹, Isao Kimura¹, Takehito Jimbo¹, Koukou Suu¹

1.ULVAC, Inc.

Lunch Break

11:45-

13:15

Session II
(Characterization)

Chair:
Shinya Yoshida
(Tohoku Univ.)

13:15

Measurement of GHz k_t² Hysteresis Curve in Piezoelectric Film/Substrate Structure Without Removing Substrate

*Takahiko Yanagitani^{1, 2, 3}

1.Waseda Univ., 2.JST CREST, 3.ZAIKEN

13:45

Investigation of Optimal Sputter-Deposition Condition for Y-doped HfO₂ Ferroelectric Film with Sub-micrometer Thickness on Si Substrate

*Lucie Ouedraogo¹, Shinya  Yoshida¹, Ryo Ebihara¹, Shuji Tanaka¹

1.Tohoku Univ.

14:00

Growth of Crystalline Sodium Potassium Niobate Thin Films at Low Temperature and Their Application to Piezoelectric
Energy Harvester

Invited

Jong-Un Woo¹, Jong-Hyun Kim¹, In-Su Kim², Ho-Sung Shin², Hyun-Gyu Hwang¹, Sang Hyo Kweon³, *Sahn Nahm^{1, 2}

1.Korea Univ., 2.Korea Univ., 3.Kobe Univ.

14:30

Piezoelectric Properties of Lead-free Epitaxial (K,Na)NbO₃ Films Grown on Si Substrates by Sputtering

*Kiyotaka Tanaka¹, Yoshimasa Sai¹, Yoshiyuki Kawata¹, Sang Hyo Kweon¹, Goon Tan², Isaku Kanno¹

1.Kobe Univ., 2.Osaka Pref. Univ.

Break

14:45-

15:00

Session III
(Device)

Chair:
Isaku Kanno
(Kobe Univ.)

15:00

AlN Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Applications

Invited

*Jin Xie¹

1.Zhejiang Univ.

15:30

Acoustic Field Evaluation of a 1.5D PMUT Array for Medical Imaging

*Kenji Suzuki¹, Yuta Nakayama^{1, 2}, Naoki Shimizu¹, Takeshi Yoshimura³, Yoshio Mita², Takashi Mizuno¹

1.Konica Minolta, Inc., 2.The University of Tokyo, 3.Osaka Pref. Univ.

15:45

Solidly Mounted Lamb Wave Resonators Based on Al_0.7Sc_0.3N Thin Films

Fazel Parsapour¹, Vladimir Pashchenko², Heinz Bernd³, Nicolay Pascal⁴, Ingo Bleyl⁵, Ulrike Roesler⁵, *Paul Muralt¹

1.EPFL, 2.Silicon Austria Labs GmbH, 3.EVATEC AG, 4.CUAS, 5.RF360 Europe GmbH

Session IV
(Thin Film Growth)

Chair:
Isaku Kanno
(Kobe Univ.)

16:00

Overcoming the PVD Challenges in Volume Production of highly-doped AlScN PiezoMEMS

*Chris Jones¹

1.SPTS Technologies Ltd

16:15

Solmates Pulsed Laser Deposition, a production platform for high quality thin film piezo materials

*Thomas Arend Aukes¹, Bart Berenbak¹, Wico Hopman¹, Kristiaan Bohm¹, Matthijn Dekkers¹, Arjen Janssens¹

1.Solmates BV

16:30

The Journey to World Class Foundry Manufacturing of PZT MEMS

Invited

*Niklas Svedin¹, Peter  Ågren¹, Andrius  Miniotas¹, Christian  Strondl¹, Christopher Ernerheim Jokumsen¹

1.Silex Microsystems

6/8

Session V
(Thin Film Growth &
Characterization)

Chair:
Tomoaki Yamada
(Nagoya Univ.)

09:00

Influence of Graded Doping on the Long – term Reliability of Nb-doped Lead Zirconate Titanate Films

Wanln Zhu¹, Betul Akkopru Akgun¹, Jung In Yang¹, Ke Wang¹, Carlos Fragkiadakis², Song Won Ko², Peter Mardilovich²,
*Susan Trolier-McKinstry¹

1.The Pennsylvania State University, 2.Xaar PLC

09:15

Highly Tensile and Compressive Stress Dependency of the Effective Longitudinal (d₃₃) and Transverse (e₃₁) Piezoelectric Coefficients of AlN Thin Films for MEMS Devices

*RAJESH PANDIYAN¹, Cheikhou Ba¹, Roland Kessels³, Gabriel Droulers², Azin Aghdaie¹, Mohamed El Gowini², Luc G Fréchette¹

1.Universite de Sherbrooke, 2.Teledyne DALSA Semiconducteur, 3. aixACCT Systems GmbH

09:30

Production of Piezoelectric Thin Film by Unique Single Crystallization Technology

Invited

*Hiroaki Kanamori¹, Akio Konishi¹, Juichiro Yamaguchi¹

1.KRYSTAL Inc.

Break

10:00-

10:15

Session VI
(Device)

Chair:
Goon Tan
(Osaka Prefecture Univ.)

10:15

High Reliable PZT-MEMS Scanning Mirror for Automotive Lighting System

Invited

*Hiroyuki Ogihara¹, Takaaki Koyama¹, Masanao Tani¹, Yoshiaki Yasuda¹

1.Stanley Electric Co., Ltd.

10:45

Resonant Drive of All-around Scanning MEMS Mirror with Piezoelectric Actuators

*Yoshitaka Kajiyama¹, Yoshiaki  Hirata¹, Yasuhito Shimakura¹, Kensuke Kanda², Takayuki Fujita², Kazusuke Maenaka²

1.Mitsubishi Electric Corporation, 2.University of Hyogo

11:00

Development of ultra-thin PZT/Silicon Vibrator for Haptics Application

*Toshihiro Takeshita¹, Takahiro Yamashita¹, Toshiyuki  Tsubakimoto², Hidetoshi  Nishio², Hiroyuki  Okuno², Takuto  Ohzawa², Takeshi  Kobayashi¹

1.National Institute of Advanced Industrial Science and Technology, 2.OMRON Corporation

11:15

Investigation of Electromechanical Characteristics of 2-degree-of-freedom MEMS Piezoelectric Vibration Energy Harvester under Impulsive Force

*Sengsavang Aphayvong¹, Takeshi Yoshimura¹, Kensuke Kanda², Shuichi Murakami³,
Norifumi Fujimura¹

1.Osaka Pref. Univ., 2.Univ. of Hyogo, 3.ORIST

11:30

Nonlinear Response in Piezoelectric MEMS Vibration Energy Harvesters using Lead-Free BiFeO₃ Film

*Shuichi Murakami¹, Takeshi Yoshimura², Sengsavang Aphayvong², Masaaki Aramaki², Yusuke Kanaoka¹, Kazuo Satoh¹, Norifumi Fujimura²

1.Osaka Research Institute of Industrial
Science and Technology, 2.Osaka Prefecture Univ.

6/9

on-demand
(Thin Film Growth)

Chair:
Takeshi Yoshimura
(Osaka Prefecture Univ.)

Invited

Chemical Solution Deposition of Lead-Based and Lead-Free Ferroelectric-Oxide Thin Films: Comparisons, Differences

*Barbara Malic^{1, 2}, Brigita Kmet^{1, 2}, Hana Ursic^{1, 2}, Andreja Bencan^{1, 2}

1.Jozef Stefan Institute, 2.Jozef Stefan International Postgraduate School

Piezoelectric Properties of Pb(Zr,Ti)O₃ Artificial Superlattice Thin Films

*Goki Kimura¹, Sang-Hyo Kweon¹, Goon Tan², Isaku Kanno¹

1.Kobe University, 2.Osaka Prefecture University

Investigation of the Growth Mechanism of Sputtered BiFeO₃ Thin Films

*Risa Kikuchi¹, Mikio Murase¹, Takeshi Yoshimura¹, Norifumi Fujimura¹

1.Osaka Pref. Univ.

Advances in Production Scale Al_1-xSc_xN with Low Film Stress and Low Number of Abnormally Oriented Grains

*Volker Roebisch¹, Xiang Yao¹, Andrea Mazzalai¹

1.EVATEC AG – BU Semiconductor

Epitaxial Growth of Al_1-xSc_xN Thin Films on Si Substrate by RF Magnetron Sputtering using TiN Buffer Layer

*Kohei Miyaji¹, Mikio Murase¹, Takeshi Yoshimura¹, Norifumi Fujimura¹

1.Osaka Pref. Univ.

on-demand
(Characterization)

Chair:
Takeshi Yoshimura
(Osaka Prefecture Univ.)

Invited

Defect Chemistry, Charge Transport Mechanisms, and Lifetime in Hheavily Nb Doped PZT Films

*Betul Akkopru-Akgun¹, Susan  Trolier-McKinstry¹

1.Penn State Univ.

Invited

PiezoMEMS-Development at Bosch – Accelerating the path to reliable materials for future product innovations

*Daniel Monteiro Diniz Reis¹

1.EPT1.2, Robert Bosch GmbH

Ferroelectric Switching Mechanism and Dynamics in Wurtzite Al_0.7Sc_0.3N Thin Films

*Keisuke Yazawa^{1, 2}, Daniel Drury ^{1, 2}, Andriy Zakutayev², Geoff L Brennecka¹

1.Colorado School of Mines, 2.Natinal Renewable Energy Laboratory

Relaxor-Ferroelectric 0.9Pb(Mg_1/3Nb_2/3)O₃–0.1PbTiO₃
Ceramic Thick Films Integrated by Aerosol Deposition on Stainless-Steel and Polymer Substrates

*Hana Ursic^{1, 2}, Matej Sadl^{1, 2}, Oana Andreea Condurache^{1, 2}, Andreja Bencan^{1, 2}, Mirela Dragomir¹, Barbara Malic^{1, 2}

1.Jozef Stefan Institute, 2.Jožef Stefan International Postgraduate School

Piezoelectric Properties of Organic Ferroelectric P (VDF-TrFE) Fabricated by Various Solvents

*Kazuki Hiratsuka¹, Izuru Kanagawa¹, Takeshi Yoshimura¹, Norifumi Fujimura¹

1.Osaka Pref. Univ.

on-demand
(Device)

Chair:
Takeshi Yoshimura
(Osaka Prefecture Univ.)

Invited

Piezoelectric pMUT Transducers for High Frequency Ultrasound Applications

*Qifa Zhou¹

1.Univ. of Southern California

Buckling Control and Design of Multilayered MEMS Diaphragms for Highly Sensitive Piezoelectric Ultrasonic
Microsnesors

*Kaoru Yamashita¹, Takuma Yoshida¹, Akifumi Nishikawa¹, Genichiro Kiyota¹, Shota Nakajima¹

1.Kyoto Institute of Technology

All-Printed Piezoelectric Haptic Device

*Longfei Song^{1, 2}, Sebastjan  Glinsek¹, Veronika Kovacova¹, Emmanuel Defay¹

1.Luxembourg Institute of Science and Technology, 2.Univ. of Luxembourg

PiezoMEMS Based 3D Imaging Systems for Space Exploration

*Runar Plunnecke Dahl-Hansen¹, Jo Gjessing¹, Jens Thielemann¹, Petter Risholm¹, Charalampos Fragkiadakis², Peter  Mardilovich², Jostein Thorstensen¹

1.SINTEF Digital, 2.AixACCT Systems GmbH

Piezoelectric MEMS Energy Harvesting from Tire Tread Acceleration

*Takahito Yokota¹, Kazusuke Maenaka¹, Kensuke Kanda¹, Takayuki Fujita¹

1.Univ. of Hyogo

Piezoelectric MEMS Mirror for Endoscope and Its Driving Integrated Circuit

*Rintaro Shimada¹, Yusuke Kitada¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹

1.Univ. of Hyogo